Microwave Discharges: Fundamentals and Applications

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Microwave Discharges: Fundamentals and...

Microwave Discharges: Fundamentals and Applications

Name: Microwave Discharges: Fundamentals and Applications
ISBN: 9781489911322

Michel Moisan, Joseph Hubert, Joëlle Margot, Gaston Sauvé, Zenon Zakrzewski (auth.), Carlos M. Ferreira, Michel Moisan (eds.)

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Surface Wave Discharges: Waves Propagation in Bounded Plasmas; C.Boisse-Laporte. Strongly Damped Surface Waves in Plasmas; G. Lister.Microwave Plasma Sources: Surface Wave Plasma Sources; Z. Zakrzewski,et al. ECR Plasma Sources; R. Wilhelm.Diagnostics: Optical Diagnostic for High Electron Density Plasmas; M. van de Sanden. Use of Emissive Probes in HF Plasmas; F.M. Dias.Modeling: Kinetic Modeling of Microwave Discharges; C.M. Ferreira. Time-Dependent EEDFs in Molecular Gases; M. Capitelli; et al.Light Sources: Applications of Microwave Discharges to High Power Light Sources; J. Waymouth.Applications: Semiconductor Processing Applications of Microwave Plasmas; J.Paraszczak, J. Heidenreich. Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas; M. Wertheimer, L. Martinu. 24 additional articles. Index.